Proceedings of the Second International Symposium on Process Physics and Modeling in Semiconductor Technology by International Symposium on Process Physics and Modeling in Semiconductor Technology (2nd 1990 MontreМЃal, QueМЃbec)

Cover of: Proceedings of the Second International Symposium on Process Physics and Modeling in Semiconductor Technology | International Symposium on Process Physics and Modeling in Semiconductor Technology (2nd 1990 MontreМЃal, QueМЃbec)

Published by Electrochemical Society in Pennington, NJ (10 S. Main St., Pennington 08534-2896) .

Written in English

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Subjects:

  • Semiconductors -- Mathematical models -- Congresses.

Edition Notes

Book details

Other titlesProcess physics and modeling in semiconductor technology.
Statementedited by G.R. Srinivasan, J.D. Plummer, S.T. Pantelides.
SeriesProceedings / Electrochemical Society ;, v. 91-4, Proceedings (Electrochemical Society) ;, v. 91-4.
ContributionsSrinivasan, G. R., Plummer, J., Pantelides, Sokrates T., Electrochemical Society. Electronics Division., Electrochemical Society. Dielectric Science and Technology Division.
Classifications
LC ClassificationsTK7871.85 .I5835 1990
The Physical Object
Paginationx, 800 p. :
Number of Pages800
ID Numbers
Open LibraryOL1898876M
LC Control Number90085817

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